X-ray tomography for microstructural objects

T Sato, O Ikeda, Y Yamakoshi, M Tsubouchi - Applied optics, 1981 - opg.optica.org
T Sato, O Ikeda, Y Yamakoshi, M Tsubouchi
Applied optics, 1981opg.optica.org
A high-resolution high-contrast x-ray tomography system for imaging the structure of
submillimeter-sized objects is constructed. A precise data acquisition mechanism to realize
a sharp pencil beam, use of an optimum x-ray band to achieve high contrast, deconvolution
processing to restore blurred projections, and the iterative revision method to compensate
for physically unavailable data are incorporated into the system. Basic experimental results
obtained for an optical fiber used as a test object show that the system has~ 20-μm spatial …
A high-resolution high-contrast x-ray tomography system for imaging the structure of submillimeter-sized objects is constructed. A precise data acquisition mechanism to realize a sharp pencil beam, use of an optimum x-ray band to achieve high contrast, deconvolution processing to restore blurred projections, and the iterative revision method to compensate for physically unavailable data are incorporated into the system. Basic experimental results obtained for an optical fiber used as a test object show that the system has ~20- μm spatial resolution and good adsorption coefficient discrimination.
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